您的位置: 首页 > 产品中心 > 耗材

>> 靶材

我们提供金属靶材、非金属靶材和化合物靶材,纯度从99.9% 到99.9999%。

我们提供标准的单一元素纯金属和定制化合物。可以获得不同的几何形状,如圆形、长方形以及多层和阶梯结构等。请查看我们的标准和特色靶材目录以获取更多信息。我们可以按照您的要求生产溅射靶材。

我们会帮助您选择合适的靶材材料、制造工艺、和粘接组件,以确保薄膜沉积工艺的成功。我们通过熔融冶金工艺或粉末冶金工艺来制备溅射靶材。我们也提供针对您系统要求的背板组合阵列。我们的粘接服务包括不同的金属粘接或银胶粘接技术。

金属靶材、非金属靶材

材料化学式纯度
Aluminum 铝Al99.9% - 99.9995%
Aluminum antimonide 锑化铝AlSb99.99%
Aluminum boride 硼化铝AlB299.50%
Aluminum fluoride 氟化铝AlF399.9% - 99.99%
Aluminum nitride 氮化铝AlN99.50%
Aluminum oxide 氧化铝Al2O399.9% - 99.99%
Aluminum phosphide 磷化铝AlP99.95%
Aluminum oxynitride 氮氧化铝Al3NO3H2O99.50%



Antimony 锑Sb99.99% - 99.999%
Antimony (III) sulfide 硫化锑Sb2S399.9% - 99.99%
Antimony oxide 氧化锑Sb2O399.9% - 99.99%
Antimony telluride 碲化锑Sb2Te399.99% - 99.999%



Arsenic 砷As99.9% - 99.9999%
Arsenic oxide 氧化砷As2O399.90%
Arsenic telluride 碲化砷As2Te399.99%



Barium strontium titanate 钛酸钡锶BST99.9% - 99.95%
Barium sulfide 硫化钡BaS99.90%
Barium zirconate 锆酸钡BaZr0399.50%
Barium ferrite 铁酸钡BaFe12O1999.90%
Barium fluoride 氟化钡BaF299.9% - 99.99%
Barium oxide 氧化钡BaO99.5% - 99.9%
Barium titanate 钛酸钡BaTiO(3)99.9% - 99.99%



Bismuth 铋Bi99.9% - 99.999%
Bismuth oxide 氧化铋Bi2O399.9% - 99.999%
Bismuth sulfide 硫化铋Bi2S399.9% - 99.99%
Bismuth telluride 碲酸铋Bi2Te399.9% - 99.999%
Bismuth titanate 钛酸铋Bi4Ti3O1299.9% - 99.99%



Boron 硼B99% - 99.999%
Boron carbide 碳化硼B4C99.50%
Boron nitride 氮化硼BN99.5% - 99.9%
Boron oxide 氧化硼B2O399.90%



Cadmium 镉Cd99.9% - 99.99%
Cadmium arsenide 砷化镉Cd3As299.9% - 99.99%
Cadmium chloride 氯化镉CdCl299.90%
Cadmium fluoride 氟化镉CdF299.9% - 99.99%
Cadmium oxide 氧化镉CdO99.9% - 99.99%
Cadmium selenide 硒化镉CdSe99.9% - 99.999%
Cadmium stannate 锡酸镉Cd2SnO499.9% - 99.99%
Cadmium sulfide 硫化镉CdS99.9% - 99.999%
Cadmium telluride 碲化镉CdTe99.9% - 99.999%



Calcium fluoride 氟化钙CaF299.9% - 99.99%
Calcium oxide 氧化钙CaO99.95%
Calcium sulfide 硫化钙CaS99.9% - 99.95%
Calcium titanate 钛酸钙CaTiO399.90%
Calcium phosphate 磷酸钙Ca3(PO4)299.90%
Calcium phosphate tribasic 碱式磷酸钙Ca10 (OH)2 (PO4)699.90%



Carbon 碳C99.9% - 99.999%



Cerium 铯Ce99.9% - 99.95%
Cerium fluoride 氟化铯CeF399.9% - 99.95%
Cerium oxide 氧化铯CeO299.5% - 99.95%



Cesium fluoride 氟化铯CsF99.9% - 99.99%
Cesium iodide 氯化铯CsI99.9% - 99.95%



Chromium 铬Cr99.5% - 99.999%
Chromium oxide 三氧化铬CrO399.90%
Chromium boride 硼化铬CrB299.90%
Chromium carbide 碳化铬Cr3C299.90%
Chromium fluoride 氟化个CrF399.90%
Chromium nitride 氮化铬Cr2N99.9% - 99.99
Chromium oxide 三氧化二铬Cr2O399.9% - 99.95%
Chromium silicide 硅化铬CrSi299.9% - 99.95%
Chromium sulfide 硫化铬Cr2S399.90%



Cobalt 钴Co99.9% - 99.999%
Cobalt ferrite 铁酸钴CoFe2O499.90%
Cobalt oxide 氧化钴CoO99.9% - 99.95%
Cobalt oxide 四氧化三钴Co3O499.95%
Cobalt silicide 硅化钴CoSi299.5% - 99.95%



Copper 铜Cu99.9% - 99.9999%
Copper (II) sulfide 硫化铜CuS99.9% - 99.95%
Copper oxide 氧化亚铜Cu2O99.9% - 99.99%
Copper oxide 氧化铜CuO99.9% - 99.99%
Copper phosphide 磷化铜Cu3P99.90%
Copper selenide 硒化铜CuSe99.9% - 99.99%
Copper sulfide 硫化铜Cu2S99.90%



Dysprosium 镝Dy99.9% - 99.95%
Dysprosium fluoride 氟化镝DyF399.9% - 99.99%
Dysprosium oxide 氧化镝Dy2O399.9% - 99.99%



Erbium fluoride 氟化铒ErF399.9% - 99.95%
Erbium oxide 氧化铒Er2O399.9% - 99.99%



Europium 铕Eu99.90%
Europium oxide 氧化铕Eu2O399.9% - 99.99%



Gadolinium 钆Gd99.90%
Gadolinium fluoride 氟化钆Gd2F399.90%
Gadolinium gallium garnet 钆镓石榴石Gd3Ga5O1299.90%



Gallium 镓Ga99.99% - 99.9999%
Gallium antimonide 锑化镓GaSb99.99% - 99.999%
Gallium arsenide 砷化镓GaAs99.9% - 99.999%
Gallium nitride 氮化镓GaN99.9% - 99.99%
Gallium oxide 氧化镓Ga2O399.9% - 99.99%



Germanium 锗Ge99.99% - 99.999%
Germanium nitride 氮化锗Ge3N499.90%
Germanium oxide 氧化锗GeO299.9% - 99.99%
Germanium selenide 硒化锗GeSe299.99%
Germanium sulfide 硫化锗GeS99.99%
Germanium telluride 碲化锗GeTe99.99% - 99.999%



Gold 金Au99.9% - 99.999%



Hafnium 铪Hf99.50%
Hafnium (IV) fluoride 氟化铪HfF499.90%
Hafnium boride 硼化铪HfB299.5% - 99.9%
Hafnium carbide 碳化铪HfC99.50%
Hafnium oxide 氧化铪HfO299.5% - 99.95%



Holmium 钬Ho99.90%
Holmium oxide 氧化钬Ho2O399.9% - 99.95%



Indium 铟In99.9% - 99.9999%
Indium telluride 碲化铟In2Te399.9% - 99.999%
Indium antimonide 锑化铟InSb99.9% - 99.999%
Indium nitride 氮化铟InN99.9% - 99.99%
Indium oxide 氧化铟In2O399.99% - 99.999%
Indium phosphide 磷化铟InP99.99%
Indium selenide 硒化铟In2Se399.95% - 99.999%
Indium oxide/Tin oxide (ITO)氧化铟/氧化锡In2O3/SnO299.99% - 99.999%



Iridium 铱Ir99.9% - 99.99%
Iridium oxide 氧化铱IrO299.90%



Iron 铁Fe99.9% - 99.99%
Iron boride 硼化铁FeB99.5% - 99.99%
Iron carbide 碳化铁Fe3C99.90%
Iron nickel oxide 氧化镍铁NiFe2O499.5% - 99.9%
Iron nitride 氮化铁FeN499.90%
Iron oxide 氧化铁Fe2O399.9% - 99.99%
Iron oxide 四氧化三铁Fe3O499.9% - 99.99%
Iron silicide 硅化铁FeSi299.9% - 99.99%
Iron disulfide 硫化铁FeS299.9% - 99.995%



Lanthanum 镧La99.90%
Lanthanum aluminate 铝酸镧LaAlO399.50%
Lanthanum boride 硼化镧LaB699.5% - 99.9%
Lanthanum strontium manganate 锰酸镧锶(La0.7Sr0.3)MnO399.90%
Lanthanum titanate 钛酸镧LaTiO399.90%



Lead 铅Pb99.9% - 99.99%
Lead (II) oxide 氧化铅PbO99.9% - 99.99%
Lead selenide 硒化铅PbSe99.9% - 99.99%
Lead telluride 碲化铅PbTe99.9% - 99.999%
Lead titanate 钛酸铅PbTiO399.9% - 99.99%



Lithium carbonate 碳酸锂Li2CO399.90%
Lithium cobalt oxide 氧化锂钴LiCoO299.90%
Lithium fluoride 氟化锂LiF99.9% - 99.99%
Lithium manganese oxide 氧化锂锰LiMn2O499.90%
Lithium niobium oxide 氧化锂铌LiNbO399.90%
Lithium oxide 氧化锂Li2O99.90%
Lithium peroxide 二氧化锂Li2O299.90%
Lithium phosphate 磷酸锂Li3PO499.9% - 99.99%
Lithium sulfate 硫酸锂Li2SO499.90%
Lithium sulfide 硫化锂Li2S99.9% - 99.99%
Lithium tetraborate 四硼酸锂Li3BO499.99%
Lithium titanate 钛酸锂Li2TiO399.90%



Lutetium 镏Lu99.9% - 99.95%
Lutetium oxide 氧化镏Lu2O399.9% - 99.99%



Magnesium 镁Mg99.9% - 99.99%
Magnesium aluminate 铝酸镁MgAl2O499.90%
Magnesium diboride 硼化镁MgB299.90%
Magnesium fluoride 氟化镁MgF299% - 99.99%
Magnesium oxide 氧化镁MgO99.9% - 99.99%
Magnesium silicide 硅化镁Mg2Si99.90%
Magnesium sulfide 硫化镁MgS99.90%



Manganese 锰Mn99.9% - 99.95%
Manganese fluoride 氟化锰MnF299.90%
Manganese Nitride 氮化锰MnN499.90%
Manganese oxide 氧化锰MnO99.90%
Manganese oxide 二氧化锰MnO299.90%
Manganese oxide 三氧化二锰Mn2O399.90%
Manganese selenide 硒化锰MnSe99.95%
Manganese sulfide 硫化锰MnS99.9% - 99.95%
Manganese telluride 碲化锰MnTe99.9% - 99.95%



Mercury selenide 硒化汞HgSe99.99% - 99.999%
Mercury telluride 碲化汞HgTe99.9% - 99.99%



Molybdenum 钼Mo99.9% - 99.99%
Molybdenum boride 硼化钼MoB99.50%
Molybdenum carbide 碳化钼Mo2C99.90%
Molybdenum disulfide 硫化钼MoS299.5% - 99.9%
Molybdenum oxide 三氧化钼MoO399.90%
Molybdenum oxide 二氧化钼MoO299.90%
Molybdenum selenide 硒化钼MoSe299.9% - 99.99%
Molybdenum silicide 硅化钼MoSi299.9% - 99.99%
Molybdenum telluride 碲化钼MoTe299.9% - 99.99%



Neodymium 铌Nd99.90%



Nickel 镍Ni99.8% - 99.999%
Nickel boride 硼化镍Ni2B99.50%
Nickel disilicide 二硅化镍NiSi299.90%
Nickel oxide 氧化镍NiO99% - 99.995%
Nickel telluride 碲化镍NiTe99.90%



Niobium 铌Nb99.8% - 99.99%
Niobium carbide 碳化铌NbC99.50%
Niobium oxide 五氧化二铌Nb2O599.9% - 99.999%
Niobium oxide 二氧化铌NbO299.9% - 99.99%
Niobium selenide 硒化铌NbSe299.90%



Osmium 锇Os99.9% - 99.95%



Palladium 钯Pd99.9% - 99.995%
Palladium oxide 氧化钯PdO99.9% - 99.95%



Phosphorus oxide 氧化磷P2O599.95%



Platinum 铂Pt99.9% - 99.999%



Praseodymium 镨Pr99.90%



Rhenium 铼Re99.9% - 99.99%



Rhodium 铑Rh99.9% - 99.99%
Rhodium oxide 氧化铑Rh2O399.90%



Ruthenium 钌Ru99.9% - 99.99%
Ruthenium oxide 氧化钌RuO299.90%



Samarium 钐Sm99.90%
Samarium fluoride 氟化钐SmF399.9% - 99.95%
Samarium oxide 氧化钐Sm2O399.9% - 99.99%



Scandium 钪Sc99.9% - 99.99%
Scandium oxide 氧化钪Sc2O399.9% - 99.99%



Selenium 硒Se99.9% - 99.9999%
Selenium oxide 氧化硒SeO299.90%



Silicon 硅Si99.9% - 99.999%
Silicon carbide 碳化硅SiC99.5% - 99.9%
Silicon dioxide 二氧化硅SiO299.9% - 99.999%
Silicon monoxide 一氧化硅SiO99.9% - 99.99%
Silicon nitride 氮化硅Si3N499.5% - 99.9%
Silicon sulfide 硫化硅SiS299.5% - 99.99%



Silver 银Ag99.9% - 99.99%
Silver chloride 氯化银AgCl99.90%
Silver oxide 氧化银Ag2O99.90%



Sodium aluminum fluoride 氟化钠铝Na5Al3F1499.50%
Sodium carbonate 碳酸钠Na2CO399.90%
Sodium chloride 氯化钠NaCl99.90%
Sodium fluoride 氟化钠NaF99.90%
Sodium oxide 氧化钠Na2O299.90%



Strontium carbonate 碳酸锶SrCO399.90%
Strontium fluoride 氟化锶SrF299.90%
Strontium molybdate 钼酸锶SrMoO499.90%
Strontium oxide 氧化锶SrO99.90%
Strontium ruthenate 钌酸锶SrRuO399.90%
Strontium sulfide 硫化锶SrS99.90%
Strontium titanate 钛酸锶SrTiO399.9% - 99.95%
Strontium zirconate 锆酸锶SrZrO399.90%



Sulfur 硫S99.90%



Tantalum 钽Ta99.9% - 99.99%
Tantalum carbide 碳化钽TaC99.90%
Tantalum nitride 氮化钽TaN99.50%
Tantalum pentoxide 五氧化二钽Ta2O599.9% - 99.99%
Tantalum selenide 硒化钽TaSe299.90%
Tantalum silicide 硅化钽TaSi299.5% - 99.9%



Tellurium 碲Te99.9% - 99.999%
Tellurium oxide 氧化碲TeO299.9% - 99.99%



Terbium 铽Tb99.90%
Terbium fluoride 氟化铽TbF399.90%
Terbium fluoride oxide 氟氧化铽TbOF99.90%
Terbium oxide 氧化铽Tb4O799.9% - 99.95%



Tin 锡Sn99.9% - 99.999%
Tin (IV) fluoride 氟化锡SnF299.90%
Tin oxide 氧化锡SnO299.9% - 99.99%
Tin Sulfide 硫化锡SnS299.90%
Tin telluride 碲化锡SnTe99.9% - 99.99%



Titanium 钛Ti99.9% - 99.999%
Titanium aluminide 铝化钛Ti3Al99.90%
Titanium boride 硼化钛TiB299.50%
Titanium carbide 碳化钛TiC99.90%
Titanium dioxide 氧化钛TiO299.9% - 99.999%
Titanium fluoride 氟化钛TiF399.90%
Titanium monoxide 一氧化钛TiO99.9% - 99.999%
Titanium nitride 氮化钛TiN99.5% - 99.99%
Titanium oxide 氧化钛Ti2O399.90%
Titanium selenide 硒化钛TiSe299.9% - 99.99%
Titanium silicide 硅化钛TiSi299.5% - 99.95%



Tungsten 钨W99.9% - 99.999%
Tungsten carbide 碳化钨WC99.50%
Tungsten oxide 氧化钨WO399.9% - 99.99%
Tungsten selenide 硒化钨WSe299.90%
Tungsten silicide 硅化钨WSi299.9% - 99.95%
Tungsten sulfide 硫化钨WS299.90%
Tungsten telluride 碲化钨WTe299.9% - 99.99%



Vanadium 钒V99.5% -99.9%
Vanadium carbide 碳化钒VC99.50%
Vanadium dioxide 二氧化钒VO299.90%
Vanadium nitride 氮化钒VN99.90%
Vanadium oxide 氧化钒V2O399.90%
Vanadium pentoxide 五氧化二钒V2O599.9% - 99.99%
Vanadium selenide 硒化钒VSe299.90%
Vanadium sulfide 硫化钒V2S399.90%



Ytterbium 镱Yb99.90%
Ytterbium fluoride 氟化镱YbF399.95%
Ytterbium oxide 氧化镱Yb2O399.9% - 99.99%



Yttrium 钇Y99.9% - 99.99%
Yttrium aluminum oxide 铝酸钇Y3Al5O1299.90%
Yttrium ferrite 铁酸钇Y3Fe5O1299.90%
Yttrium fluoride 氟化钇YF399.9% - 99.99%
Yttrium oxide 氧化钇Y2O399.9% - 99.99%



Zinc 锌Zn99.9% - 99.999%
Zinc fluoride 氟化锌ZnF299.9% - 99.99%
Zinc nitride 氮化锌Zn3N299.90%
Zinc oxide 氧化锌ZnO99.9% - 99.999%
Zinc phosphide 磷化锌Zn3P299.90%
Zinc selenide 硒化锌ZnSe99.99% - 99.995
Zinc sulfide 硫化锌ZnS99.9% - 99.99%
Zinc telluride 碲化锌ZnTe99.99%



Zirconium 锆Zr99.5% - 99.9
Zirconium boride 硼化锆ZrB299.50%
Zirconium carbide 碳化锆ZrC99.50%
Zirconium chloride 氯化锆ZrCl499.50%
Zirconium fluoride 氟化锆ZrF499.90%
Zirconium nitride 氮化锆ZrN99.90%
Zirconium oxide 氧化锆ZrO299.5% - 99.9%
Zirconium silicide 硅化锆ZrSi299.90%
Zirconium oxide/Yttrium oxide (YSZ) 氧化锆/氧化钇ZrO2/Y2O399.90%

化合物靶材

Oxides氧化物
Al2O3 氧化铝CuO 氧化铜PbZrO3 锆酸铅Supercond.Y2O3 氧化钇
Sb2O3 氧化锑HfO2 unstab. 氧化铪 不稳定相LiNbO3 铌酸锂SrO 氧化锶ZnO 氧化锌
BaTiO3 钛酸钡HfO2/CaO 氧化铪/氧化钙MgO 氧化镁SrTiO3 钛酸锶ZnO dop.掺杂氧化锌
Bi2O3 氧化铋HfO2/Y2O3 氧化铪/氧化钇MoO3 氧化钼SrZrO3 锆酸锶ZrO2 unstab. 氧化锆不稳定态
Bi2TiO5 钛酸铋In2O3 氧化铟Nb2O3 氧化铌Ta2O5 氧化钽ZrO2/CaO 氧化锆/氧化钙
Bi4Ti3O12 钛酸铋ITO Nb2O5 氧化铌ThO2 氧化钍ZrO2/Y2O3 氧化锆/氧化钇
BiTiO3 钛酸铋LaAlO3 铝酸镧Re2O3 氧化铼SnO2 氧化锡
CeO2 氧化铯La2O3 氧化镧SiO2 氧化硅TiO2 氧化钛
CrO3 氧化铬PbTiO3 钛酸铅SiO 一氧化硅WO3 氧化钨其他


Borides 硼化物
CrB2 硼化铬Mo2B6 硼化钼TiB2 硼化钛VB2 硼化钒
HfB2 硼化铪NbB2 硼化铌WB 硼化钨ZrB2 硼化锆
LaB6 硼化镧TaB2 硼化钽W2B 硼化二钨
其他


Carbides 碳化物
B4C 碳化硼Mo2C 碳化钼TaC 碳化钽WC6%Co 碳化钨-6%钴ZrC 碳化锆
Cr3C2 碳化铬NbC 碳化铌TiC 碳化钛WC12%Co 碳化钨-12%钴
HfC 碳化铪SiC 碳化硅WC 碳化钨VC 碳化钒其他


Fluorides 氟化物
AlF3 氟化铝CeF3 氟化铯LiF 氟化锂Re/NaF 氟化铼/钠YF3 氟化钇
BaF2 氟化钡LaF3 氟化镧MgF2 氟化镁Na3AlF6 氟化钠铝
CaF2 氟化钙PbF2 氟化铅KF 氟化钾ThF4 氟化铊其他


Nitrides 氮化物
AlN 氮化铝HfN 氮化铪Si3N4 氮化硅TiN 氮化钛ZrN 氮化锆
BN 碳化硼NbN 氮化铌TaN 氮化钽VN 氮化钒其他


Silicides 硅化物
CrSi2 二硅化铬MoSi2 硅化钼TaSi2 二硅化钽Ti5Si3硅化钛V3Si 硅化钒
Cr3Si 硅化三铬NbSi2 硅化铌Ta5Si3 三硅化五钽WSi2 硅化钨ZrSi2 硅化锆
HfSi2 硅化铪PtSi 硅化铂TiSi2 硅化钛VSi2 硅化钒其他


Sulfides, Selenides, Tellurides 硫化物、硒化物、碲化物
As2S3 硫化砷PbS 硫化铅NbSe2 硫化铌TaTe2 碲化钽ZnS 硫化锌
CdSe 硒化镉PbTe 碲化铅Nb-S 铌-硫WSe2 硒化钨ZnTe 碲化锌
CdSe 硒化镉MoSe2 硒化钼NbTe2 碲化铌WS2 硫化钨
CdTe 碲化镉MoS2 硫化钼TaSe2 硒化钽WTe2 碲化钨
PbSe 硒化铅MoTe2 碲化钼TaS2 硫化钽ZnSe 硒化锌其他