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>> 碲化锌晶圆/衬底

化学式ZnTe
 
晶体生长
生长方法Markov
 
晶体性质
晶体结构立方体
Crystal axis:(111)
Orientation:(100); (110); (111) ±30 arc minutes.
Other orientations available on request.
Lattice paramters, Aa = 6.1034
Specific resistivity, Ohm cm
undoped:
doped:
1x106
--
Hall mobility, cm2/V/sec130(h)
EPD, cm-1< 5x105
Density of low angle boundaries, cm-1< 10
Twins and stacking faults:twin free
Orientation accuracy:max. 1°; typ. < 0.5°
Standard wafer sizes:5 mm x 5 mm, 10 mm x 10 mm
and round ø 40 mm
Max. sizes of wafers
(at thickness 1 mm):
(111) ø 40 mm
(110) 35 x 15
(100) 35 x 15
Standard thickness:0.5 mm or 1 mm
Tolerances
Width/Length:
Diameter:
Thickness:

                   ± 0.050 mm
+ 0.000 mm / -0.100 mm
± 0.050 mm
Polishing:one side or both sides polished.
Optical Polishing
Chemical mechanical polishing